Semiconductor Polysilicon Automated Clean Lifting Solution

Move furnace and silicon-tooling assemblies on a defined clean route.

A semiconductor-grade polysilicon workshop has sensitive cleanliness requirements and a classified atmosphere, so crane friction, dust and ignition protection cannot be treated separately.

Use an automated cleanroom explosion-proof crane to move furnace and silicon-tooling loads between the reduction furnace, cleaning and transfer platforms. Position feedback, automatic hook handling and particle collection should be verified in the real route.